(Digital Presentation) Internal Friction, Mechanical Spectroscopy of SiO2, Radiation Functionalized Nanocomposites of Multiwalled Carbon Nanotubes and Polyamide, Polyethylene, Polyvinylchloride

Introduction A method for determining the integral density of structural defects n D in SiO 2 +Si disk – wafer plates was developed, which is the basis of metal – dielectric – semiconductor (MDS) structures in the manufacture of large integrated circuits (LIC) for production technology to express the post-operational control of the perfection of the structure of multilayer epitaxial structures and the growth reliability of decent p-n junctions in the production of semiconductor devices [1-3]. Amplitude-dependent IF measurement (ADIF) can be used as a highly sensitive method to monitor the nanoplastic deformation e ND of SiO 2 +Si wafer plates [4-6]. Experimental procedure The study of the influence of structural defects on the damping of vibrations of SiO 2 +Si wafer plates with diameter D ≈ 100 mm and thicknesses of h SiO2 ≈ 600 nm allows the estimation of the degree of perfection of the crystalline structure. Ultrasonic (US) pulse-phase method using USMV-LETI, modernized USMV-KNU and computerized “KERN-4” devices with frequencies f ┴ ≈ 0.7 MHz and f ║ ≈ 1 MHz and were used [7-10]. Results and discussion The temperature dependence of IF Q -1 (T) in SiO 2 +Si wafer plates p -type, doped with B , KDB-7.5(100) with diameter D ≈ 100∙10 -3 m, SiO 2 layer thickness h SiO2 ≈ 100 nm, and Si layer thickness h Si ≈ 460∙10 3 nm are shown. IF Q -1 , mechanical spectroscopy of radiation functionalized nanocompositesof MCNT polyamide (NH(CH 2 ) 5 CO) n , polyethylene (C 2 H 4 ) n , and polyvinylchloride (C 2 H 3 Cl) n are presented. The influence of ultrasound (US) deformation ε US studied on IF Q -1 and dynamic elastic modulus E = r V ║ 2 , dynamic shear modulus G = r V ^ 2 of MCNT nanocomposites. Conclusions The study of SiO 2 +Si wafer-plate vibrations at adjacent harmonic frequencies f 0 and f 2 made it possible to develop a technique for determining the structural defect density n D and the broken layer depth h BL . Internal friction Q -1 , dynamical shear modulus G , dynamical elastic modulus Е , Poisson coefficient μ are dependent from SiO 2 +Si wafer-plate anisotropy. The increase of the nanocomposite crystallinity degree at growth of multiwalled carbon nanotubes concentration filling with the nanotubes of matrix results in the decline of content of organized phase. As the result of mechanical study the presence of the strong effect between polyamide, polyvinylchloride, polyethylene and multiwalled carbon nanotubes was confirmed. The presence of the strong interaction for nanocomposite between polyamide-6 (NH(CH 2 ) 5 CO) n and multiwalled carbon nanotubes was confirmed by mechanical studies. References [1] Onanko A. P., Charny D. V., Onanko Y. 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