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Electron microscope investigation of the microplastic deformation mechanisms of silicon by indentation
Summary
This materials science paper uses electron microscopy to study dislocation structures and phase transformations in silicon crystals under indentation at various temperatures. The term 'microplastic deformation' refers to small-scale plastic deformation in crystalline silicon and is entirely unrelated to environmental plastic pollution.
The specific features of the dislocation structure, occuring in the vicinity of indentations have been studied using Si single crystals under different conditions of deformation (at temperatures of 20 to 700 °C and loadings of 0.5 to 10 p). It is shown, that the deformation of crystals at temperatures of 350 to 650 °C results in twin formation with {111} twinning plane. Flat defects with {115} habit plane are revealed. They are shown to be platelets of a new phase, which is of the hexagonal structure with c = 6.31 Å and a = 3.86 Å. The possible mechanism of the phase transformation is discussed. [Russian text ignored].
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