0
Article ? AI-assigned paper type based on the abstract. Classification may not be perfect — flag errors using the feedback button. Tier 2 ? Original research — experimental, observational, or case-control study. Direct primary evidence. Sign in to save

Nanoindentation tests on diamond-machined silicon wafers

Applied Physics Letters 2005 65 citations ? Citation count from OpenAlex, updated daily. May differ slightly from the publisher's own count. Score: 30 ? 0–100 AI score estimating relevance to the microplastics field. Papers below 30 are filtered from public browse.
Jiwang Yan, Hirokazu Takahashi, Jun’ichi TAMAKI, Xiaohui Gai, Hirofumi Harada, John Patten

Summary

This precision manufacturing study used nanoindentation to examine how diamond-turning creates an amorphous surface layer on silicon wafers, finding this layer has different mechanical properties than pristine silicon. This is a semiconductor manufacturing study with no relevance to environmental microplastics.

Nanoindentation tests were performed on ultraprecision diamond-turned silicon wafers and the results were compared with those of pristine silicon wafers. Remarkable differences were found between the two kinds of test results in terms of load-displacement characteristics and indent topologies. The machining-induced amorphous layer was found to have significantly higher microplasticity and lower hardness than pristine silicon. When machining silicon in the ductile mode, we are in essence always machining amorphous silicon left behind by the preceding tool pass; thus, it is the amorphous phase that dominates the machining performance. This work indicated the feasibility of detecting the presence and the mechanical properties of the machining-induced amorphous layers by nanoindentation.

Sign in to start a discussion.

More Papers Like This

Article Tier 2

Investigation of Indenter-Size-Dependent Nanoplasticity of Silicon by Molecular Dynamics Simulation

This study used molecular dynamics simulations to investigate how indenter size affects the nanoscale plastic deformation of silicon. It is a materials science study on nanomechanics and is not related to environmental microplastics.

Article Tier 2

Atomistic Studies of Nanoindentation—A Review of Recent Advances

This review covers advances in using computer simulations to understand how materials deform at the nanoscale during nanoindentation testing. The research is in materials science and not directly related to environmental microplastics.

Article Tier 2

Electron microscope investigation of the microplastic deformation mechanisms of silicon by indentation

This materials science paper uses electron microscopy to study dislocation structures and phase transformations in silicon crystals under indentation at various temperatures. The term 'microplastic deformation' refers to small-scale plastic deformation in crystalline silicon and is entirely unrelated to environmental plastic pollution.

Article Tier 2

Subsurface mechanical damage correlations after grinding of various optical materials

Researchers studied how loose abrasive grinding causes subsurface damage in various optical materials. This materials engineering paper has no relevance to environmental microplastics.

Article Tier 2

A Microplasticity Analysis of Micro-Cutting Force Variation in Ultra-Precision Diamond Turning

This ultra-precision machining engineering paper developed a microplasticity model to predict how cutting forces vary with the crystallographic orientation of aluminum when machined with diamond tools. This is a precision manufacturing study where 'microplasticity' refers to sub-yield material deformation, not environmental microplastic particles.

Share this paper