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Direct evidence for microplastic fracture in single-crystal silicon at ambient temperature

Philosophical Magazine Letters 1998 16 citations

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High-resolution transmission electron microscopy was used to directly image a microcrack in silicon induced by Vickers indentation at room temperature, revealing two dislocations at the crack tip and atomic-scale steps on the crack surface. This is direct evidence that crack propagation in silicon involves localized plastic deformation, not purely brittle cleavage, at the crack tip.

A high-resolution transmission electron microscopy image of a microcrack in single-crystal silicon induced by Vickers indentation at ambient temperature is presented. Two 60o dislocations can be clearly seen at the crack tip. The surface of the crack shows a step structure. This microplastic crack is compared with an atomically sharp crack.

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