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Reusable TiN Substrate for Surface Plasmon Resonance Heterodyne Phase Interrogation Sensor

Nanomaterials 2020 18 citations ? Citation count from OpenAlex, updated daily. May differ slightly from the publisher's own count. Score: 30 ? 0–100 AI score estimating relevance to the microplastics field. Papers below 30 are filtered from public browse.
Ru-Jing Sun, Ru-Jing Sun, Hung Ji Huang, Chien‐Nan Hsiao, Chien‐Nan Hsiao, Yu‐Wei Lin, Bo-Huei Liao, Bo-Huei Liao, Yuan‐Fong Chou Chau, Hai‐Pang Chiang

Summary

Researchers developed a reusable titanium nitride sensor for high-sensitivity surface plasmon resonance measurements. This is a materials science and sensor engineering study with no direct relevance to microplastics or human health.

A TiN-based substrate with high reusability presented high-sensitivity refractive index measurements in a home-built surface plasmon resonance (SPR) heterodyne phase interrogation system. TiN layers with and without additional inclined-deposited TiN (i-TiN) layers on glass substrates reached high bulk charge carrier densities of 1.28 × 10<sup>22</sup> and 1.91 × 10<sup>22</sup> cm<sup>-3</sup>, respectively. The additional 1.4 nm i-TiN layer of the nanorod array presented a detection limit of 6.1 × 10<sup>-7</sup> RIU and was higher than that of the 46 nm TiN layer at 1.2 × 10<sup>-6</sup> RIU when measuring the refractive index of a glucose solution. Furthermore, the long-term durability of the TiN-based substrate demonstrated by multiple processing experiments presented a high potential for various practical sensing applications.

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