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Based on a size of Microplastics, Multi-Channel Microwave Resonant MEMS Sensor
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Researchers designed a multi-channel MEMS sensor that can simultaneously measure the concentration of microplastics and sort them by size using microwave resonance technology. This miniaturized detection approach addresses a key technical challenge in microplastic monitoring — the need for rapid, size-resolved quantification at low concentrations in water.
In this paper, the multi-channel high-frequency resonant MEMS sensor, which can measure the concentration of microplastics while classifying their sizes, is proposed. The MEMS filter with multiple reservoir channels fabricated through the in-house MEMS process sorts microplastics injected through the microfluidic channel by size and accumulates them in the reservoir. The microwave resonant sensor, used to measure the concentration of size-classified and accumulated microplastics, is applied the CMSRR structure to achieve notch frequency shift sensitivity based on their concentration. The classification characteristic of the multi-channel MEMS filter was verified through experiments using the microplastics dispersion. The performance of microwave resonant sensor was simulated through the commercial simulation tool.
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