Based on a size of Microplastics, Multi-Channel Microwave Resonant MEMS Sensor

In this paper, the multi-channel high-frequency resonant MEMS sensor, which can measure the concentration of microplastics while classifying their sizes, is proposed. The MEMS filter with multiple reservoir channels fabricated through the in-house MEMS process sorts microplastics injected through the microfluidic channel by size and accumulates them in the reservoir. The microwave resonant sensor, used to measure the concentration of size-classified and accumulated microplastics, is applied the CMSRR structure to achieve notch frequency shift sensitivity based on their concentration. The classification characteristic of the multi-channel MEMS filter was verified through experiments using the microplastics dispersion. The performance of microwave resonant sensor was simulated through the commercial simulation tool.