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Monolithic Integration of Acoustic Enrichment and Resonant Sensing for Trace Detection of Micro-Plastics
Summary
Researchers developed a monolithic chip integrating acoustic enrichment and resonant mass sensing via a 3x3 piezoelectric micromachined resonator array, demonstrating particle focusing within 30 seconds and a significantly larger frequency shift for microplastic detection in seawater compared to random particle dispersion.
We present a novel technique that integrates acoustic enrichment and liquid-phase mass sensing on a single chip fabricated with a 3×3 piezoelectric micromachined resonator array (PMRA). A SiN barrier layer completely covers the surface of the PMRA, providing insulation and dustproof protection. The PMRA, connected in parallel, is driven solely by a single RF signal of 20 V for acoustic particles focusing within 30 seconds. The frequency shift after particles were loaded at the central area (1.75 kHz) is significantly larger than the random dispersion (1.05 kHz). This technique shows potential for point-of-care detection and identification of microplastics in seawater.
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